1.

Conference Proceedings
Conference Proceedings
1. Introduction of a die-to-database verification tool for the entire printed geometry of a die: geometry verification system NGR2100 for DFM
Kitamura, T. ; Kubota, K. ; Hasebe, T. ; Sakai, F. ; Nakazawa, S. ; Vohra, N. ; Yamamoto, M. ; Inoue, M.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.73-84,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756
2.

Conference Proceedings
Conference Proceedings
2. Introduction of a die-to-database verification tool for mask geometry NGR4000 [6349-150]
Hoffman, M. J. ; Kitamura, T. ; Kubota, K. ; Hasebe, T. ; Nakazawa, S. ; Tokumoto, T. ; Tsuneoka, M. ; Yamamoto, M. ; lnoue, M.
Pub. info.: Photomask Technology 2006.  pp.634940-634940,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
3.

Conference Proceedings
Conference Proceedings
3. Introduction of a die-to-database verification tool for the entire printed geometry of a die: geometry verification system NGR2100 for DFM [5853-88]
Kitamura, T. ; Kubota, K. ; Hasebe, T. ; Sakai, F. ; Nakazawa, S. ; Vohra, N. ; Yamamoto, M. ; Inoue, M.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.988-999,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853