1.

Conference Proceedings
Conference Proceedings
1. Application of phase-edge PSM for narrow logic gate
Kim,B. ; Park,C. ; Ryoo,M. ; Lee,K. ; Cho,H. ; Moon,J.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.943-952,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
2.

Conference Proceedings
Conference Proceedings
2. Emergence of assist feature OPC era in sub-130-nm DRAM devices
Kim,B. ; Kim,I. ; Yeo,G. ; Lee,J. ; Choi,J. ; Cho,H. ; Moon,J.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.452-459,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186