1.

Conference Proceedings

Conference Proceedings
Chang,J. ; Abdo,A. ; Kim,B. ; Bloomstein,T.M. ; Engelstad,R.L. ; Lovell,E.G. ; Beckman,W.A. ; Mitchell,J.W.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.756-767,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
2.

Conference Proceedings

Conference Proceedings
Lee,P.-T. ; Kim,B. ; Frisque,G.A. ; Tejeda,R.O. ; Engelstad,R.L. ; Lovell,E.G. ; Beckman,W.A. ; Mitchell,J.W.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.779-785,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676