1.

Conference Proceedings

Conference Proceedings
You, T.-J. ; Kim, H.S. ; Kim, J.-S. ; Kim, S.-K. ; Kim, Y.-D. ; Youn, H.S. ; Kong, K.-K.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1327-1334,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
2.

Conference Proceedings

Conference Proceedings
Kim, S.-K. ; Kim, J.-S. ; Yoo, T.-J. ; Kong, K.-K. ; Yun, H.-S. ; Kim, Y.-D. ; Kim, H.-R. ; Kim, Y.-S. ; Kim, H.S.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1321-1326,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
3.

Conference Proceedings

Conference Proceedings
Kim, S.-K. ; Oh, H.-K. ; Kim, H.S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.281-286,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
4.

Conference Proceedings

Conference Proceedings
Kim, Y.-S. ; You, T.J. ; Kim, J.-S. ; Kim, S.-K. ; Kong, K.-K. ; Kim, Y.-D. ; Kim, H.S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  2  pp.1107-1113,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038