1.
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Conference Proceedings
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Lee, J.-B. ; Park, J.-H. ; Seo, D.-C. ; Kim, C.-M. ; Lim, Y.-T. ; Cho, S.-D. ; Joo, H.-S. ; Jeon, H.-P. ; Kim, S.-J.
Pub. info.: |
Advances in Resist Technology and Processing XIX. Part Two pp.623-630, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4690 |
|
2.
|
Conference Proceedings
|
Park, J.H. ; Seo, D.C. ; Kim, C.-M. ; Lim, Y.-T. ; Cho, S.-D. ; Lee, J.B. ; Joo,H.-S. ; Jeon, H.-P. ; Kim, S.-J. ; Jung, J.-C. ; Shin, K.-S. ; Kong, K.K. ; Yamada, T.
Pub. info.: |
Advances in Resist Technology and Processing XIX. Part One pp.120-126, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4690 |
|