1.
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Conference Proceedings
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Jung, M.-H. ; Yoon, S. ; Chung, E.-S. ; Yoo, B.-S. ; Ya, J.Y. ; Winning, D. ; Kim, B.D. ; Lee, H. ; Kim, D.Y. ; Kim, Y.H. ; Kim, M. ; Chon, S.-M.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.703-710, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
|
2.
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Conference Proceedings
|
Yoon, S. ; Kim, M. ; Lee, H. ; Kim, D.Y. ; Kim, Y.H. ; Kim, B.D. ; Kim, J.H. ; Kim, K.-M. ; Lee, S.Y. ; Chon, S.-M.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.583-590, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
|
3.
|
Conference Proceedings
|
Lee, S.Y. ; Kim, M. ; Yoon, S. ; Kim, K.-M. ; Kim, J.H. ; Kim, H.-W. ; Woo, S.-G. ; Kim, Y.H. ; Chon, S.-M. ; Kishioka, T. ; Sone, Y. ; Nakajima, Y.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.575-582, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
|