Kim, M. ; Park, S. U. ; Kim, D. Y. ; Kwon, S. C. ; Choi, Y.
Pub. info.:
PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China. pp.3823-3826, 2005. Uetikon-Zuerich. Trans Tech Publications
Choi, M. Y. ; Choi, Y. ; Choe, J. I. ; Kim, M. ; Kwon, S. C.
Pub. info.:
PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China. pp.4005-4008, 2005. Uetikon-Zuerich. Trans Tech Publications
Choi, Y. ; Choi, M. Y. ; Hahn, Y. S. ; Kim, M. ; Kwon, S. C.
Pub. info.:
PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China. pp.3815-3818, 2005. Uetikon-Zuerich. Trans Tech Publications
Photomask and Next-Generation Lithography Mask Technology XIII. pp.62832F-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering