Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.537-542, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Smart structures and materials 2003 : Smart electronics, MEMS, BioMEMS, and nanotechnology : 3-6 March 2003, San Diego, California, USA. pp.98-105, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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