Preserving EAPSM phase and transmission in the clean process
- Author(s):
Choi, S.-J. ( Photronics-PKL (South Korea) ) Yoon, S.-Y. Kim, Y.-D. Lee, H.-W. Kim, D.-H. Lee, S.-W. Lee, D.-H. Kim, J.-M. Choi, S.-S. Jeong, S.H. - Publication title:
- 22nd Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4889
- Pub. Year:
- 2002
- Vol.:
- Part One
- Page(from):
- 713
- Page(to):
- 724
- Pages:
- 12
- Pub. info.:
- Bellingham, WA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819446756 [0819446750]
- Language:
- English
- Call no.:
- P63600/4889
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Characteristics of residues and optical change of HT PSM during stepwise west cleaning and optimization of HT PSM cleaning process
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
The analysis of optical signal transmission characteristics in laser diodes [6124-49]
SPIE - The International Society of Optical Engineering |
2
Conference Proceedings
Etching selectivity and surface profile of attenuated phase-shifting mask using CF4/O2/He inductively coupled plasma (ICP)
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
3
Conference Proceedings
Evaluation of reticle cleaning performance with different drying methods for high-grade photomasks
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Highly anisotropic etching of phase-shift masks using ICP of CF4-SF6-CHF3 gas mixtures
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
An electrical model of VCSEL as optical transmitter for optical printed circuit board
SPIE - The International Society of Optical Engineering |
5
Conference Proceedings
Comparative evaluation of mask production CAR development processes with stepwise defect inspection
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
6
Conference Proceedings
Parameters affecting megasonic power transmittance in the megasonic cleaning process
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
90-nm-node CD uniformity improvement using a controlled gradient temperature CAR PEB process
SPIE-The International Society for Optical Engineering |