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Hydrodynamic Performance of Micro Gas Bearing Fabricated by Deep X-Ray Lithography.

Author(s):
Publication title:
A.S.M.E. paper
Title of ser.:
ASME Technical Paper : TRIB
Ser. no.:
2003
Pub. Year:
2003
No.:
2003-TRIB-111
Paper no.:
2003-TRIB-111
Pages:
9
Pub. info.:
New York, NY: American Society of Mechanical Engineers
Language:
English
Call no.:
A11800
Type:
Technical Paper

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