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Conference Proceedings

1. Optimizing Injection Molding towards Multiple Quality and Cost Issues

Yao, D. ; Kim, B. ; Choi, J. ; Brown, R.

Pub. info.:	ANTEC 2000 Conference proceedings, May 7-11, 2000, Orlando, Florida. pp.756-760, 2000. Brookfield Center, CT. Society of Plastics Engineers, Inc. (SPE)
Title of ser.:	Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.:	46

Conference Proceedings

2. EFFECT OF MOLTEN ALKALINE CARBONATE ON THE HIGH TEMPERATURE CORROSION OF Cr

Ota, K. ; Kim, B. ; Abe, Y. ; Yoshitake, H. ; Kamiya, N.

Pub. info.:	Proceedings of the Third International Symposium on Carbonate Fuel Cell Technology. pp.252-263, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-3

Conference Proceedings

3. Solubility and Corrosion of Cobalt in Molten Carbonates

Kim, B. ; Takeishi, Y. ; Yoshitake, H. ; Kamiya, N. ; Ota, K.

Pub. info.:	Proceedings of the Ninth International Symposium on Molten Salts. pp.757-764, 1994. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1994-13

Conference Proceedings

4. Development of Rapid Heating and Cooling Mold Inserts Comprising a Heating Layer, an Insulation Layer and a Substrate

Yao, D. ; Chen, M. ; Kim, B.

Pub. info.:	ANTEC 2001, conference proceedings, Dallas, Texas, May 6-10. pp.704-708, 2001. Brookfield Center, CT. Society of Plastics Engineers
Title of ser.:	Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.:	47

Conference Proceedings

5. Direct Search-Based Automatic Minimization of Weldlines in Injection Molded Parts

Yao, D. ; Kim, B.

Pub. info.:	Conference proceedings at ANTEC '98 : plastics on my mind, Society of Plastics Engineers, Atlanta, Georgia, April 26-April 30, 1998. 3 pp.3073-3077, 1998. Brookfield Center, CT. Society of Plastics Engineers, Inc. (SPE)
Title of ser.:	Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.:	44(3)

Conference Proceedings

6. Self-Propagating High-Temperature Synthesis for Aluminium Oxynitride (AION)

Lee, J. ; Lee, I. ; Chung, H. ; Ahn, J.G. ; Kim, D.J. ; Kim, B.

Pub. info.:	Eco-materials processing & design VII : proceedings of the Conference of the 7th International Symposium on Eco-materials Processing & Design, January 8-11 2006, Chengdu, China. pp.662-665, 2006. Uetikon-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	510-511

Conference Proceedings

7. Automated Search of the Optimal Robust Injection Molding Design against Process Variation

Yao, D. ; Kim, B.

Pub. info.:	ANTEC '99 Conference proceedings, New York City, May 2-6, 1999 : plastics bridging the millennia. 1 pp.651-655, 1999. Brookfield Center, CT. Society of Plastics Engineers, Inc. (SPE)
Title of ser.:	Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.:	45(1)

Conference Proceedings

8. Fabrication of ionic-polymer-metal-composite (IPMC) micropump using a commercial Nafion

Pak, J.J. ; Kim, J. ; Oh, S.W. ; Son, J.H. ; Cho, S.H. ; Lee, S.-K. ; Park, J.-Y. ; Kim, B.

Pub. info.:	Smart structures and materials 2004 : electroactive polymer actuators and devices (EAPAD) : 15-18 March 2004, San Diego, California, USA. pp.272-280, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5385

Conference Proceedings

9. Optimization of Process Conditions in Gas-Assisted Injection Molding

Chen, M. ; Yao, D. ; Kim, B.

Pub. info.:	ANTEC 2001, conference proceedings, Dallas, Texas, May 6-10. pp.754-758, 2001. Brookfield Center, CT. Society of Plastics Engineers
Title of ser.:	Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.:	47

10.

Conference Proceedings

10. Development of Rapid Heating and Cooling Mold Inserts Comprising a heating Layer, an Insulation Layer and a Substrate

Yao, D. ; Chen, M. ; Kim, B.

Pub. info.:	ANTEC 2001, conference proceedings, Dallas, Texas, May 6-10. pp.704-708, 2001. Brookfield Center, CT. Society of Plastics Engineers
Title of ser.:	Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.:	47

11.

Conference Proceedings

11. SOFT X-RAY PHOTOELECTRON SPECTROSCOPY OF BI-METALLIC INTERFACIAL BONDING

Shinn, N. D. ; Kim, B. ; Andrews, A. B. ; Erskine, J. L. ; Kim, K. J. ; Kang, T. -H.

Pub. info.:	Applications of synchrotron radiation techniques to materials science : symposium held April 12-15, 1993, San Francisco, California, U.S.A.. pp.167-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	307

12.

Conference Proceedings

12. Open Pore Biodegradable Matrices Formed With Gas Foaming

Harris, L. ; Kim, B. ; Mooney, D.

Pub. info.:	AIChE ANNUAL MEETING - NOVEMBER 16-21, 1997 - LOS ANGELES, CA. 1997. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE meeting [papers]
Ser. no.:	1997

13.

Conference Proceedings

13. Analysis of mechanical characteristics of the ionic polymer metal composite (IPMC) actuator using cast ion-exchange film

Kim, B. ; Kim, B.M. ; Ryu, J.J. ; Oh, I.-H. ; Lee, S.-K. ; Cha, S.-E. ; Pak, J.

Pub. info.:	Smart structures and materials 2003 : Electroactive polymer actuators and devices (EAPAD) : 3-6 March 2003, San Diego, California, USA. pp.486-495, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5051

14.

Conference Proceedings

14. Tadpole Robot (TadRob) using ionic polymer metal composite (IPMC) actuator

Jung, J.J. ; Tak, Y. ; Kim, B. ; Park, J.-O. ; Lee, S.-K. ; Pak, J.

Pub. info.:	Smart structures and materials 2003 : Electroactive polymer actuators and devices (EAPAD) : 3-6 March 2003, San Diego, California, USA. pp.272-280, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5051

15.

Conference Proceedings

15. Experimental analysis on the properties of polypyrrole as drug delivery system materials

Lee, S.-K. ; Lee, S.-J. ; Cho, S.-H. ; Pak, J.J. ; Kim, B.

Pub. info.:	Smart structures and materials 2003 : Electroactive polymer actuators and devices (EAPAD) : 3-6 March 2003, San Diego, California, USA. pp.338-348, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5051

16.

Conference Proceedings

16. Microfocusing source and multilayer-based beam generator for Mo Kα radiation

Jiang, L. ; Verman, B. ; Seshadri, S. ; Kim, B.

Pub. info.:	Advances in laboratory-based X-ray sources and optics III : 8 July, 2002, Seattle, Washington, USA. pp.96-103, 2002. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4781

17.

Conference Proceedings

17. Biomedical applications of electroactive polymers and shape-memory alloys (Invited Paper)

Lee, S.-K. ; Lee, S.-J. ; An, H.-J. ; Cha, S.-E. ; Chang, J.K. ; Kim, B. ; Pak, J.J.

Pub. info.:	Smart structures and materials 2002 : electroactive polymer actuators and devices (EAPAD) : 18-21 March 2002, San Diego, USA. pp.17-31, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4695

18.

Conference Proceedings

18. Two-Material Injection Molding Filling Simulation

Liu, W. ; Kim, B. ; Yao, D.

Pub. info.:	ANTEC 2004, 62nd annual technical conference, Chicago, IL, May 16-20, 2004. pp.506-510, 2004. Brookfield Center, Conn.. Society of Plastics Engineers
Title of ser.:	Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.:	62

19.

Conference Proceedings

19. Silicon Optical Bench utilizing BCB Waveguide on the V-grooved Oxidized Porous Silicon;

Kim, B.

Pub. info.:	Proceedings from the tenth Meeting of the Symposium on Polymers for Microelectronics [May 8th, 9th, & 10th, 2002]. pp.802-838, 2002. [S.l.]. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2002-16

20.

Conference Proceedings

20. Rapid Thermal Response (RTR) Hot Embossing of Micro-Structures

Liu, W. ; Kimerling, T. ; Kim, B. ; Yao, D.

Pub. info.:	ANTEC 2004, 62nd annual technical conference, Chicago, IL, May 16-20, 2004. pp.933-936, 2004. Brookfield Center, Conn.. Society of Plastics Engineers
Title of ser.:	Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.:	62

21.

Conference Proceedings

21. Performance Stability of Microfocusing Source and Multilayer Optics Based X-Ray Diffraction System

Kim, B. ; Verman, B. ; Jiang, L.

Pub. info.:	EPDIC 8 : proceedings of the eighth European Powder Diffraction Conference, held May 23-26, 2002 in Uppsala, Sweden. pp.159-162, 2004. Zuerich-Uetikon, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	443-444

22.

Conference Proceedings

22. Analytical Comparison of Parallel Beam and Bragg-Brentano Diffractometer Performances

Verman, B. ; Kim, B.

Pub. info.:	EPDIC 8 : proceedings of the eighth European Powder Diffraction Conference, held May 23-26, 2002 in Uppsala, Sweden. pp.167-170, 2004. Zuerich-Uetikon, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	443-444

23.

Conference Proceedings

23. A Simple Analytical Approach to Describe a Beam Conditioning System

Verman, B. ; Seshadri, S. ; Kim, B.

Pub. info.:	EPDIC 8 : proceedings of the eighth European Powder Diffraction Conference, held May 23-26, 2002 in Uppsala, Sweden. pp.171-174, 2004. Zuerich-Uetikon, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	443-444

24.

Conference Proceedings

24. Simulation of Squeezing Flow during Hot Embossing of Polymer Microstructures

Virupaksha, V. ; Yao, D. ; Kim, B.

Pub. info.:	ANTEC 2004, 62nd annual technical conference, Chicago, IL, May 16-20, 2004. pp.1049-1053, 2004. Brookfield Center, Conn.. Society of Plastics Engineers
Title of ser.:	Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.:	62

25.

Conference Proceedings

25. Nonscanning computed tomography imaging spectropolarimeter (NS-CTISP): design and calibration

Miles, B.H. ; Kim, B.

Pub. info.:	Polarization: measurement, analysis, and remote sensing VI : 15 April 2004, Oriando, Florida, USA. pp.155-166, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5432

26.

Technical Paper

26. Effect of Chamber Pressure Variation on High-Frequency Hydrodynamic Instability of Shear Coaxial Injector

Kim, B. ; Heister, S.

Pub. info.:	AIAA meeting papers on disc. 2004. [Reston, Va.]. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit
Ser. no.:	40th

27.

Technical Paper

27. Guidance Law for Automatic Landing of Tilt-Rotor Aircraft

Min, B. ; Tahk, M. ; Kim, B. ; Shin, H.

Pub. info.:	AIAA meeting papers on disc. 2005. [Reston, Va.]. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA Guidance Navigation and Control Conference
Ser. no.:	2005

28.

Technical Paper

28. 6-DOF Nonlinear Simulation of Vision-Based Formation Flight

Sattigeri, R. ; Calise, A. ; Kim, B. ; Volyanskyy, K. ; Kim, N.

Pub. info.:	AIAA meeting papers on disc. 2005. [Reston, Va.]. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA Guidance Navigation and Control Conference
Ser. no.:	2005

29.

Technical Paper

29. Improvement of Durability in HSDI Diesel Cylinder Head.

Kim, B. ; Chang, H. ; Lee, K. ; Kim, C.

Pub. info.:	2005 SAE world congress : technical paper. 2005. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2005

30.

Technical Paper

30. Optimum Guide Position Design of a Cockpit Module for Decreasing the Permanent Deformation.

Kim, B. ; Kim, H.

Pub. info.:	2010 SAE world congress : technical paper. 2010. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2010

31.

Technical Paper

31. Fatigue Life analysis of Automotive V-belt Pulley.

Kim, B. ; Kim, Y. ; Chun, D.-M. ; Ahn, S.-H. ; Jang, J.D.

Pub. info.:	14th Asia Pacific Automotive Engineering Conference : SAE technical paper. 2007. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2007

32.

Technical Paper

32. Chemiluminescence Based Sensors for Turbine Engines

Murugandam, T.M. ; Kim, B. ; Olsen, R. ; Patel, M. ; Romig, B. ; Seitzman, J.M.

Pub. info.:	AIAA paper. 2003. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit
Ser. no.:	2003

33.

Technical Paper

33. Analysis of Swirl Coaxial Injecor with Backhole as an Acoustic Damper in Liquid Rocket Engines

Cha, E. ; Kim, D. ; Kim, B. ; Yoon, Y. ; Bazarov, V.

Pub. info.:	AIAA meeting papers on disc. 2005. [Reston, Va.]. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit
Ser. no.:	41st

34.

Technical Paper

34. Two-Phase Modeling and Hydrodynamic Instability Study of Shear Coaxial Injector Flow.

Kim, B. ; Heister, S.D.

Pub. info.:	AIAA paper. 2002. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit
Ser. no.:	2002

35.

Technical Paper

35. Fluid Leak-Detection Application for Space Shuttle Hydrazine Auxiliary Power Unit (APU).

Nguyen, B. ; Kim, B. ; Forsyth, B.

Pub. info.:	AIAA paper. 2002. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit
Ser. no.:	2002

36.

Technical Paper

36. Heat Transfer Coefficients on a Flat Surface Impinged by the Under-expanded Sonic Jet

Yu, M. ; Kim, B. ; Cho,H. ; Hwang, K. ; Bae,J.

Pub. info.:	AIAA meeting papers on disc. 2004. [Reston, Va.]. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.:	42nd

37.

Conference Proceedings

37. A superelastic alloy microgripper with embedded electromagnetic actuators and piezoelectric sensors

Kim, D. -H. ; Lee, M. G. ; Kim, B. ; Shim, J.

Pub. info.:	Optomechatronic Micro/Nano Components, Devices, and Systems. pp.230-237, 2004. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5604

38.

Conference Proceedings

38. Spectral tuning and mode competition in quantum cascade lasers studied by time- resolved Fourier transform spectroscopy [6386-18]

Fuchs, F. ; Kim, B. ; Mann, Ch. ; Yang, Q. ; Bronner, W. ; Raynor, B. ; Kohler, K. ; Wagner, J.

Pub. info.:	Optical Methods in the Life Sciences. pp.63860I-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6386

39.

Conference Proceedings

39. Simulation approach to the improvement of dispersion tolerance for electrical-binary-signal-based duobinary transmitters [6353-160]

Kim, B. ; Lee, J. ; Lee, H. ; Kim, S. K. ; Hwang, S. ; Oh, Y. ; Jeong J.

Pub. info.:	Optical Transmission, Switching, and Subsystems IV. pp.635346-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6353

40.

Conference Proceedings

40. A curvature sensor using white-light scanning interferometry [6292-48]

Kim, B. ; Kim, S. ; Kwon, Y. ; Lee, Y. ; Yang, H. ; Rhee, H.

Pub. info.:	Interferometry XIII: Techniques and Analysis. pp.629219-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6292

41.

Conference Proceedings

41. Human vocal organ: visible-human-male-based three-dimensional visualization

Kim, J. ; Lee, D. ; Han, J.H. ; Kim, B. ; Kim, D. ; Kang, H.S.

Pub. info.:	Medical Imaging 2002: Visualization, Image-Guided Procedures, and Display. pp.661-668, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4681

42.

Conference Proceedings

42. CMOS-compatible RF MEMS switch

Lakamraju, N. V. ; Kim, B. ; Phillips, S. M.

Pub. info.:	MEMS, MOEMS, and Micromachining. pp.193-201, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5455

43.

Conference Proceedings

43. How large MEEF is acceptable for the low-k1 lithography- [5992-97]

Nam, D. ; Lee, D. -G. ; Kim, B. ; Moon, S. -Y. ; Choi, S. -W. ; Han, W. -S.

Pub. info.:	25th Annual BACUS Symposium on Photomask Technology. pp.59922W-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5992

44.

Conference Proceedings

44. Improved modeling of fogging and loading effect correction [5992-165]

Lee, S. ; Kim, B. ; Han, H. ; Nam, D. ; Moon, S. ; Choi, S. ; Han, W.

Pub. info.:	25th Annual BACUS Symposium on Photomask Technology. pp.59924U-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5992

45.

Conference Proceedings

45. Study of the beam blur and its effect on the future mask fabrication [6349-33]

Lee, S. ; Park, S. ; Ahn, M. ; Doh, J. ; Kim, S. ; Kim, B. ; Choi, S. ; Han, W.

Pub. info.:	Photomask Technology 2006. pp.63490X-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6349

46.

Conference Proceedings

46. Defence R&D Canada's autonomous intelligent systems program

Digney, B. L. ; Hubbard, P. ; Gagnon, E. ; Lauzon, M. ; Rabbath, C. ; Beckman, B. ; Collier, J. A. ; Penzes, S. G. ; Broten, G. S. ; Monckton, S. P. ; Trentini, M. ; Kim, B. ; Farell, P. ; Hopkin, D.

Pub. info.:	Unmanned Ground Vehicle Technology VI. pp.493-507, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5422

47.

Conference Proceedings

47. Noise bandwidth suppression circuit for low-noise IRFPA

Kim, B. ; Kang, S.-G. ; Lee, H.C. ; Kim, C.-K.

Pub. info.:	Infrared Technology and Applications XXVIII. Part One pp.327-333, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4820

48.

Conference Proceedings

48. Deformable diffraction grating for scanning microinterferometer arrays

Kim, B. ; Schmittdiel, M.C. ; Degertekin, F.L. ; Kurfess, T.R.

Pub. info.:	MOEMS Display and Imaging Systems II. pp.98-107, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5348

49.

Conference Proceedings

49. Ultrafast wafer alignment simulation based on thin film theory

Wu, Q. ; Williams, G. ; Kim, B. ; Strane, J. ; Wiltshire, T.J. ; Lehner, E.A. ; Akatsu, H.

Pub. info.:	Metrology, Inspection, and Process Control for Microlithography XVI. Part One pp.364-373, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4689

50.

Conference Proceedings

50. Study of higher electron beam energy for the mask production for 30 nm node technology [6283-06]

Lee, S. ; Park, S. ; Kim, B. ; Choi, S. ; Han, W.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology XIII. pp.628308-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6283

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