Karoui, F.Sahtout ; Karoui, A. ; Inoue, N. ; Rozgonyi, G.A.
Pub. info.:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.381-386, 2004. Warrendale, Pa.. Materials Research Society