1.

Conference Proceedings

Conference Proceedings
Liateni,K. ; Moulinier,D. ; Affour,B. ; Boutamine,H. ; Karam,J.M. ; Veychard,D. ; Courtois,B. ; Cao,A.D.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part1  pp.161-170,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
2.

Conference Proceedings

Conference Proceedings
Karam,J.M. ; Courtois,B. ; Cao,A.D. ; Hofmann,K.
Pub. info.: Micromachined Devices and Components IV.  pp.278-286,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514