SOI Wafer Fabrication by Atomic Layer Cleaving
- Author(s):
Current, M.I. Malik, I.J. Bedell, SW. Farrens, S.N. Kirk, H. Korolik, M. Kang, S. Fuerfanger, M. Henley, F.J. - Publication title:
- High Purity Silicon VI : proceedings of the sixth International Symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2000-17
- Pub. Year:
- 2000
- Page(from):
- 516
- Page(to):
- 523
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772846 [1566772842]
- Language:
- English
- Call no.:
- E23400/200017
- Type:
- Conference Proceedings
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