Blank Cover Image

Characterization of High-K Dielectrics Using the Non-Contact Surface Charge Profiler (SCP) Method

Author(s):
Roman, P. ( (Penn State University) )
Lee, D. ( (Penn State University) )
Mumbauer, P. ( (PRIMAXX, Inc.) )
Grant, R. ( (PRIMAXX, Inc.) )
Kamieniecki, E. ( (QC Solutions, Inc.) )
Ruzyllo, J. ( (Penn State University) )
1 more
Publication title:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-5
Pub. Year:
2000
Page(from):
187
Page(to):
192
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772709 [1566772702]
Language:
English
Call no.:
E23400/2000-5
Type:
Conference Proceedings

Similar Items:

Roman, P., Lee, D.D., Wang, J., Mumbauer, P., Grant, R., Tower, J., Kamieniecki, E., Lukasiak, L., Ruzyllo, aud J.

Electrochemical Society

Chang, K., Shanmugasundaram, K., Lee, D.-O., Roman, P., Shallenberger, J., Chang, F.-M., Wang, J., Beck, R., Mumbauer, …

Electrochemical Society

Ruzyllo,J., Roman,P., Staffa,J., Kashkoush,I., Kamieniecki,E.

SPIE-The International Society for Optical Engineering

Roman, P., Lee, D.-O., Wang, J., Wu, C.-T., Subramanian, V., Brubaker, M., Mumbauer, P., Grant, R., Ruzyllo, J.

Electrochemical Society

Roman, P., Kashkoush, I., Novak, R.E., Kamieniecki, E., Ruzyllo, J.

Electrochemical Society

Hwang, D.K., Ruzyllo, J., Kamieniecki, E.

Electrochemical Society

Roman, P., Hwang, D., Torek, K., Ruzyllo, J., Kamieniecki, E.

MRS - Materials Research Society

Chang, K., Shallenberger, J., Chang, F.-M., Shanmugasundaram, K., Roman, P., Mumbauer, P., Ruzyllo, J.

Electrochemical Society

Lee, D., Roman, P., Mumbauer, P., Grant, R., Horn, M., Ruzyllo, J.

Electrochemical Society

Hwang, D.K., Ruzyllo, J., Kamieniecki, E.

Electrochemical Society

Ruzyllo,J., Roman,P., Lee,D.-O., Brubaker,M., Kamieniecki,E.

SPIE - The International Society for Optical Engineering

Daffron, C., Torek, K., Ruzyllo, J., Kamieniecki, E.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12