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Conference Proceedings

1. Characterization of copper and nickel contamination using recombination lifetime techniques

Walz, D. ; Joly, J.P. ; Suarez, M. ; Palleau, J. ; Kamarinos, G.

Pub. info.:	ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands. pp.64-72, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-30

Conference Proceedings

2. Comparative study of on-line lifetime techniques for the monitoring of metallic micro contamination for ULSI microelectronics

Walz, D. ; Joly, J.P. ; Kamarinos, G. ; Barla, K.

Pub. info.:	ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands. pp.35-43, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-30