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Large Scaled ALD/PECVD Reactor for Flat Panel Display Application

Author(s):
Publication title:
Atomic layer deposition applications 3
Title of ser.:
ECS transactions
Ser. no.:
11(7)
Pub. Year:
2007
Page(from):
31
Page(to):
38
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775731 [1566775736]
Language:
English
Call no.:
E23400/11-7
Type:
Conference Proceedings

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