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Pub. info.:
Silicon-on-insulator technology and devices 13. pp.59-70, 2007. Pennington, N.J.. Electrochemical Society
Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas. pp.58-69, 1994. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering