1.

Conference Proceedings

Conference Proceedings
K. Kojima ; S. Kuroda ; H. Okumura ; K. Arai
Pub. info.: Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006.  pp.85-88,  2007.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 556-557
2.

Conference Proceedings

Conference Proceedings
K. Kojima ; T. Morita
Pub. info.: Proton exchange membrane fuel cells 8.  pp.185-198,  2008.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(2)
3.

Conference Proceedings

Conference Proceedings
R. Kosugi ; Y. Sakuma ; K. Kojima ; S. Itoh ; A. Nagata
Pub. info.: Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation.  pp.785-788,  2013.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 740-742
4.

Conference Proceedings

Conference Proceedings
K. Kojima ; A. Nagata ; S. Ito ; Y. Sakuma ; R. Kosugi
Pub. info.: Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation.  pp.793-796,  2013.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 740-742
5.

Conference Proceedings

Conference Proceedings
K. Masumoto ; K. Kojima ; H. Okumura
Pub. info.: Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation.  pp.193-196,  2013.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 740-742
6.

Conference Proceedings

Conference Proceedings
S.Y. Ji ; K. Kojima ; Y. Ishida ; H. Tsuchida ; S. Yoshida
Pub. info.: Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation.  pp.181-184,  2013.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 740-742
7.

Conference Proceedings

Conference Proceedings
S.Y. Ji ; K. Kojima ; R. Kosugi ; S. Saito ; Y. Sakuma
Pub. info.: Silicon Carbide and Related Materials 2015 : [ICSCRM 2015] : selected, peer reviewed papers from the 16th International Conference on Silicon Carbide and Related Materials, October 4-9, 2015, Giardini Naxos, Italy.  pp.181-184,  2016.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 858
8.

Conference Proceedings

Conference Proceedings
K. Yamada ; J. Senzaki ; K. Kojima ; H. Okumura
Pub. info.: Silicon Carbide and Related Materials 2015 : [ICSCRM 2015] : selected, peer reviewed papers from the 16th International Conference on Silicon Carbide and Related Materials, October 4-9, 2015, Giardini Naxos, Italy.  pp.433-436,  2016.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 858
9.

Conference Proceedings

Conference Proceedings
M. Tsujimura ; H. Kitai ; H. Shiomi ; K. Kojima ; K. Fukuda
Pub. info.: Silicon Carbide and Related Materials 2015 : [ICSCRM 2015] : selected, peer reviewed papers from the 16th International Conference on Silicon Carbide and Related Materials, October 4-9, 2015, Giardini Naxos, Italy.  pp.441-444,  2016.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 858
10.

Conference Proceedings

Conference Proceedings
M. Deki ; T. Makino ; K. Kojima ; T. Tomita ; T. Ohshima
Pub. info.: Silicon Carbide and Related Materials 2014 : Selected peer reviewed papers from the European Conference on Silicon Carbide & Related Materials (ECSCRM 2014), September 21-25, 2014, Grenoble, France.  pp.673-676,  2015.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 821-823
11.

Conference Proceedings

Conference Proceedings
S. Tanimoto ; K. Ueoka ; T. Fujita ; S. Araki ; K. Kojima
Pub. info.: Silicon Carbide and Related Materials 2015 : [ICSCRM 2015] : selected, peer reviewed papers from the 16th International Conference on Silicon Carbide and Related Materials, October 4-9, 2015, Giardini Naxos, Italy.  pp.769-772,  2016.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 858
12.

Conference Proceedings

Conference Proceedings
K. Kojima ; T. Kato ; S. Ito ; J. Kojima ; F. Hirose
Pub. info.: Silicon Carbide and Related Materials 2010 : Selected, peer reviewed papers from the 8th European Conference on Silicon Carbide and Related Materials (ECSCRM 2010), held in Oslo (Sundvolden Conference Centre), Norway, August 29th - September 2nd.  pp.8-11,  2011.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 679-680
13.

Conference Proceedings

Conference Proceedings
T. Makino ; N. Iwamoto ; S. Onoda ; T. Ohshima ; K. Kojima
Pub. info.: Silicon carbide and related materials 2011 : selected, peer reviewed papers from the 14th International Conference on Silicon Carbide and Related Materials 2011 (ICSCRM 2011), September 11-16, 2011, Cleveland, Ohio, USA.  pp.469-472,  2012.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 717-720
14.

Conference Proceedings

Conference Proceedings
S. Hishiki ; N. Iwamoto ; T. Ohshima ; H. Itoh ; K. Kojima
Pub. info.: Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007.  pp.707-710,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 600-603
15.

Conference Proceedings

Conference Proceedings
J. Senzaki ; A. Shimozato ; M. Okamoto ; K. Kojima ; K. Fukuda
Pub. info.: Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007.  pp.787-790,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 600-603
16.

Conference Proceedings

Conference Proceedings
K. Kojima ; H. Okumura ; K. Arai
Pub. info.: Silicon carbide and related materials 2008 : selected peer reviewed papers from the 7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain.  pp.113-116,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 615-617
17.

Conference Proceedings

Conference Proceedings
K. Kojima ; S. Ito ; A. Nagata ; H. Okumura
Pub. info.: Silicon carbide and related materials 2011 : selected, peer reviewed papers from the 14th International Conference on Silicon Carbide and Related Materials 2011 (ICSCRM 2011), September 11-16, 2011, Cleveland, Ohio, USA.  pp.141-144,  2012.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 717-720
18.

Conference Proceedings

Conference Proceedings
J. Senzaki ; A. Shimozato ; K. Kojima ; T. Kato ; Y. Tanaka
Pub. info.: Silicon carbide and related materials 2011 : selected, peer reviewed papers from the 14th International Conference on Silicon Carbide and Related Materials 2011 (ICSCRM 2011), September 11-16, 2011, Cleveland, Ohio, USA.  pp.703-708,  2012.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 717-720
19.

Conference Proceedings

Conference Proceedings
N. Iwamoto ; S. Onoda ; T. Ohshima ; K. Kojima ; K. Kawano
Pub. info.: Silicon carbide and related materials 2008 : selected peer reviewed papers from the 7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain.  pp.517-520,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 615-617
20.

Conference Proceedings

Conference Proceedings
T. Kitamura ; S. Nakashima ; T. Kato ; K. Kojima ; H. Okumura
Pub. info.: Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007.  pp.501-504,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 600-603
21.

Conference Proceedings

Conference Proceedings
C. Ota ; J. Nishio ; T. Hatakeyama ; T. Shinohe ; K. Kojima ; S.I. Nishizawa ; H. Ohashi
Pub. info.: Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006.  pp.881-884,  2007.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 556-557
22.

Conference Proceedings

Conference Proceedings
M. Adachi ; K. Kojima ; K. Hayashi
Pub. info.: Advanced biomedical and clinical diagnostic systems V : 21-23 January 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6430
23.

Conference Proceedings

Conference Proceedings
K. Kojima ; S. Ito ; J. Senzaki ; H. Okumura
Pub. info.: Silicon carbide and related materials 2009 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2009, Nurnberg, Germany, October 11-16, 2009.  pp.99-102,  2010.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 645-648
24.

Conference Proceedings

Conference Proceedings
C. Kudou ; K. Tamura ; J. Nishio ; K. Masumoto ; K. Kojima
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.139-142,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
25.

Conference Proceedings

Conference Proceedings
J. Nishio ; C. Kudou ; K. Tamura ; K. Masumoto ; K. Kojima
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.109-112,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
26.

Conference Proceedings

Conference Proceedings
T. Miyazawa ; S.Y. Ji ; K. Kojima ; Y. Ishida ; K. Nakayama
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.135-138,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
27.

Conference Proceedings

Conference Proceedings
K. Tamura ; C. Kudou ; K. Masumoto ; J. Nishio ; K. Kojima
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.214-217,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
28.

Conference Proceedings

Conference Proceedings
S.Y. Ji ; K. Kojima ; Y. Ishida ; H. Yamaguchi ; S. Saito
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.151-154,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
29.

Conference Proceedings

Conference Proceedings
K. Kojima ; K. Masumoto ; S. Ito ; A. Nagata ; H. Okumura
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.125-130,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
30.

Conference Proceedings

Conference Proceedings
H. Sazawa ; T. Kato ; K. Kojima ; K. Furuta ; K. Hirata ; M. Kosaki ; M. Kinoshita ; T. Mitani ; S. Nakashima ; H. Okumura
Pub. info.: Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006.  pp.1043-1046,  2007.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 556-557
31.

Conference Proceedings

Conference Proceedings
S. Harada ; S. Ito ; M. Kato ; A. Takatsuka ; K. Kojima
Pub. info.: Silicon carbide and related materials 2009 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2009, Nurnberg, Germany, October 11-16, 2009.  pp.999-1004,  2010.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 645-648
32.

Conference Proceedings

Conference Proceedings
J. Senzaki ; A. Shimozato ; K. Kojima ; S. Harada ; K. Ariyoshi
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.521-524,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
33.

Conference Proceedings

Conference Proceedings
T. Tanaka ; K. Matsuura ; K. Kojima ; M. Ohno
Pub. info.: THERMEC 2009, 6th International Conference on PROCESSING & MANUFACTURING OF ADVANCED MATERIALS, Berlin, Germany, August 25-29, 2009.  pp.1860-1865,  2010.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 638-642
34.

Conference Proceedings

Conference Proceedings
T. Mitani ; S. Nakashima ; M. Tomobe ; S.Y. Ji ; K. Kojima
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.475-478,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
35.

Conference Proceedings

Conference Proceedings
M. Deki ; T. Makino ; K. Kojima ; T. Tomita ; T. Ohshima
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.440-443,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
36.

Conference Proceedings

Conference Proceedings
M. Sasaki ; K. Tamura ; H. Sako ; M. Kitabatake ; K. Kojima
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.398-401,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
37.

Conference Proceedings

Conference Proceedings
M. Nakabayashi ; T. Fujimoto ; H. Tsuge ; K. Kojima ; K. Abe
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.453-456,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
38.

Conference Proceedings

Conference Proceedings
N. Iwamoto ; S. Onoda ; T. Ohshima ; K. Kojima ; A. Koizumi
Pub. info.: Silicon carbide and related materials 2009 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2009, Nurnberg, Germany, October 11-16, 2009.  pp.921-924,  2010.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 645-648
39.

Conference Proceedings

Conference Proceedings
K. Ariyoshi ; S. Harada ; J. Senzaki ; T. Kojima ; K. Kojima
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.615-618,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
40.

Conference Proceedings

Conference Proceedings
R. Kosugi ; Y. Sakuma ; K. Kojima ; S. Itoh ; A. Nagata
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.845-850,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
41.

Conference Proceedings

Conference Proceedings
H. Suo ; K. Eto ; T. Kato ; K. Kojima ; H. Osawa ; H. Okumura
Pub. info.: Silicon Carbide and Related Materials 2016.  pp.3-6,  2017.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 897
42.

Conference Proceedings

Conference Proceedings
K. Mochizuki ; S.Y. Ji ; R. Kosugi ; K. Kojima ; Y. Yonezawa ; H. Okumura
Pub. info.: Silicon Carbide and Related Materials 2016.  pp.47-50,  2017.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 897
43.

Conference Proceedings

Conference Proceedings
S. Tsukimoto ; T. Ise ; G. Maruyama ; S. Hashimoto ; T. Sakurada ; J. Senzaki ; T. Kato ; K. Kojima ; H. Okumura
Pub. info.: Silicon Carbide and Related Materials 2016.  pp.177-180,  2017.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 897
44.

Conference Proceedings

Conference Proceedings
A. Miyasaka ; K. Kojima ; K. Momose ; H. Osawa ; H. Okumura
Pub. info.: Silicon Carbide and Related Materials 2016.  pp.59-62,  2017.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 897
45.

Technical Paper

Technical Paper
K. Yamagishi ; Y. Onuma ; S. Ohara ; K. Hasegawa ; K. Kojima
Pub. info.: SAE 2016 International Powertrains, Fuels & Lubricants Meeting : technical paper.  2016.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2016
46.

Technical Paper

Technical Paper
K. Naitoh ; S. Ohara ; Y. Onuma ; K. Kojima ; K. Hasegawa
Pub. info.: SAE 2016 International Powertrains, Fuels & Lubricants Meeting : technical paper.  2016.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2016
47.

Technical Paper

Technical Paper
J. Lekki ; R. Anderson ; Q. Nguyen ; J. Demers ; G. Leshkevich ; J. Flatico ; K. Kojima
Pub. info.: AIAA meeting papers on disc.  2009.  Reston, Va..  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA Infotech@Aerospace Conference and Exhibit
Ser. no.: 2009
48.

Conference Proceedings

Conference Proceedings
M. Sasaki ; K. Tamura ; H. Yamaguchi ; H. Matsuhata ; K. Kojima
Pub. info.: Silicon Carbide and Related Materials 2014 : Selected peer reviewed papers from the European Conference on Silicon Carbide & Related Materials (ECSCRM 2014), September 21-25, 2014, Grenoble, France.  pp.285-288,  2015.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 821-823
49.

Conference Proceedings

Conference Proceedings
D. Shiono ; H. Hada ; H. Yukawa ; H. Oizumi ; I. Nishiyama ; K. Kojima ; H. Fukuda
Pub. info.: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6519
50.

Conference Proceedings

Conference Proceedings
H. Tanabe ; G. Yoshizawa ; Y. Liu ; V. L. Tolani ; K. Kojima ; N. Hayashi
Pub. info.: Photomask and next-generation lithography mask technology XIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6607