Search records | 東京工業大学附属図書館文献データベース

Sort order

3 results

Conference Proceedings

1. Deep Levels Generated by Ion-Implantation in n- and p-Type 4H-SiC

K. Kawahara ; G. Alfieri ; T. Kimoto

Pub. info.:	Silicon carbide and related materials 2008 : selected peer reviewed papers from the 7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain. pp.365-368, 2009. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	615-617

Conference Proceedings

2. Effects of Thermal Oxidation on Deep Levels Generated by Ion Implantation into n-Type and p-Type 4H-SiC

K. Kawahara ; G. Alfieri ; T. Hiyoshi ; G. Pensl ; T. Kimoto

Pub. info.:	Silicon carbide and related materials 2009 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2009, Nurnberg, Germany, October 11-16, 2009. pp.651-654, 2010. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	645-648

Conference Proceedings

3. Reactive-Ion-Etching Induced Deep Levels Observed in n-Type and p-Type 4H-SiC

K. Kawahara ; G. Alfieri ; M. Krieger ; T. Kimoto

Pub. info.:	Silicon carbide and related materials 2009 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2009, Nurnberg, Germany, October 11-16, 2009. pp.759-762, 2010. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	645-648