1.

Conference Proceedings
Conference Proceedings
1. Low-voltage-point source microscope for interferometry
Frost, B.G. ; Joy, D.C. ; Thesen, A.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.576-583,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
2.

Conference Proceedings
Conference Proceedings
2. Soft electron beam etching for precision TEM sample preparation
Rack, P.D. ; Thesen, A. ; Randolph, S. ; Fowlkes, J.D. ; Joy, D.C.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  2  pp.943-949,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038