1.

Conference Proceedings

Conference Proceedings
Ko, Y.-U. ; Joy, D.C.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.565-575,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
2.

Conference Proceedings

Conference Proceedings
Ko, Y.-U. ; Joy, D.C. ; Hector, S.D. ; Lu, B.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.293-302,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038