1.

Conference Proceedings

Conference Proceedings
St Onge, S. ; Joseph, A. ; Lanzerotti, L. ; Feiichenfeld, N. ; Coolbaugh, D. ; Orner, B. ; Dunn, J. ; Harame, D.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.193-205,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-06
2.

Conference Proceedings

Conference Proceedings
Harame, D. ; Subbanna, S. ; Dunn, J. ; St Onge, S.A. ; Freeman, G. ; Malinowski, J. ; Groves, R. ; Joseph, A. ; Ahlgren, D. ; Johnson, R. ; Zierak, M. ; Coolbaugh, D.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.143-146,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18