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Optimization of a C2F6 Clean for an Applied Materials' TEOS PECVD Process: Reduced PFC Emissions and Faster Clean Times

Author(s):
Johnson, A.D. ( Air Products and Chemicals, Inc. )
Entley, W.R. ( Air Products and Chemicals, Inc. )
Vrtis, R.N. ( Air Products and Chemicals, Inc. )
Langan, J. ( Air Products and Chemicals, Inc. )
Maroulis, P. ( Air Products and Chemicals, Inc. )
Chen, C.M. ( Taiwan Semiconductor Manufacturing Co., Ltd )
Chen, C.T. ( Taiwan Semiconductor Manufacturing Co., Ltd )
Chang, Y.C. ( Taiwan Semiconductor Manufacturing Co., Ltd )
Yam, O.H. ( Taiwan Semiconductor Manufacturing Co., Ltd )
4 more
Publication title:
Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-7
Pub. Year:
2000
Page(from):
21
Page(to):
32
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772723 [1566772729]
Language:
English
Call no.:
E23400/2000-7
Type:
Conference Proceedings

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