Silicon Piezoresistive Cantilever Beam with Porous Silicon Element
- Author(s):
Domanski, K. Tomaszewski, D. Grabiec, P. Gniazdowski, Z. Kudla, A. Beck, R.B. Jakubowski, A. Gotszalk, T. Rangelow, I.W. - Publication title:
- Proceedings of the Eleventh International Workshop on the Physics of Semiconductor Devices : (December 11-15, 2001)
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4746
- Pub. Year:
- 2002
- Vol.:
- VOL-1
- Page(from):
- 523
- Page(to):
- 526
- Pages:
- 4
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445001 [0819445002]
- Language:
- English
- Call no.:
- P63600/4746
- Type:
- Conference Proceedings
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