1.

Conference Proceedings
Conference Proceedings
1. EFFECT OF CORROSION INHIBITOR, lH-BENZOTRJAZOLE (BTAH) ON PARTICLE ADHESION IN Cu CMP
J.-H. Song ; Y.-K. Hong ; T.-G. Kim ; Y.-J. Kang ; I.-K. Kim ; J.-H. Han ; J.-G. Park ; A. A. Busnaina
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.341-348,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)
2.

Conference Proceedings
Conference Proceedings
2. THE EFFECTS OF pH ADJUSTORS IN POST Cu CMP CLEANING SOLUTIONS ON PARTICLE ADHESION AND REMOVAL
Y.-K. Hong ; J.-H. Song ; Y.-J. Kang ; I.-K. Kim ; J.-G. Park ; H.-S. Song ; K.-S. Kim ; J.-J. Myung ; H.-J. Lee ; S.-Y. Song
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.333-340,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)
3.

Conference Proceedings
Conference Proceedings
3. Harmonic quadrature demodulation for extracting the envelope of the second harmonic component
S.-M. Kim ; J.-H. Song ; T.-K. Song
Pub. info.: Medical imaging 2008, ultrasonic imaging and signal processing : 17-18 February 2008, San Diego, California, USA.  pp.692017-1-692017-10,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6920