J.-B. Jun ; J.-H. Lee ; J.-G. Park ; J.-G. Koo ; J.-I. Kim
Pub. info.:
New developments and application in chemical reaction engineering : proceedings of the 4th Asia-Pacific Chemical Reaction Engineering Symposium (APCRE '05) : Gyeongju, Korea, June 12-15, 2005. pp.765-768, 2006. Amsterdam. Elsevier
J.-G. Park ; S. Lee ; Y.-S. Kang ; Y.-K. Park ; T. Kitamura
Pub. info.:
Metrology, inspection, and process control for microlithography XXII. 2 pp.69222C-1-69222C-9, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering