1.

Conference Proceedings

Conference Proceedings
S. Lee ; W.-S. Song ; H.-R. Kim ; J.-G. Park
Pub. info.: ASME JSME 2007 5th Joint Fluids Engineering Conference (FEDSM2007).  2B  pp.1095-1102,  2007.  New York.  American Society of Mechanical Engineers
Title of ser.: ASME Symposia Volumes
Ser. no.: FEDSM 2007(2B)
2.

Conference Proceedings

Conference Proceedings
J.-G. Park ; S. Lee ; Y.-S. Kang ; Y.-K. Park ; T. Kitamura
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  2  pp.69222C-1-69222C-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922