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Conference Proceedings

1. Mist Deposition for TFT Technology

K. Shanmugasundaram ; S. Price ; K. Chang ; D. Lee ; J. Ruzyllo

Pub. info.:	Thin Film Transistor Technology 8. pp.255-259, 2006. Pennington, N.J.. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	3(8)

Conference Proceedings

2. EFFECT OF SILICON SURFACE CONDITION ON FILM FORMATION USING MIST DEPOSITION

K. Shanmugasundaram ; K. Chang ; J. Ruzyllo

Pub. info.:	Cleaning Technology in Semiconductor Device Manufacturing IX. pp.105-110, 2006. Pennington, NJ. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	1(3)

Conference Proceedings

3. SURFACE ROUGHNESS IN SILICON CARBIDE TECHNOLOGY

K. Chang ; T. Witt ; A. Hoff ; R. Woodin ; R. Ridley ; G. Dolny ; K. Shanmugasundaram ; E. Oborina ; J. Ruzyllo

Pub. info.:	Cleaning Technology in Semiconductor Device Manufacturing IX. pp.228-233, 2006. Pennington, NJ. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	1(3)