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Physicas and technology of high-k gate dielectrics : proceedings of the International Symposium on High Dielectric Constant Materials : Materials Science, Processing, and Reliability, and Manufacturing Issues. pp.75-82, 2002. Pennington, NJ. Electrochemical Society
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment. pp.121-128, 2007. Pennington, NJ. Electrochemical Society