Modification of oxygen-doped polysilicon using ion implantation
- Author(s):
- Publication title:
- Second International Conference on Thin Film Physics and Applications : '94 TFPA : 15-17 April 1994, Shanghai, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2364
- Pub. Year:
- 1994
- Page(from):
- 147
- Page(to):
- 150
- Pages:
- 4
- Pub. info.:
- Bellingham, WA: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819417084 [0819417084]
- Language:
- English
- Call no.:
- P63600/2364
- Type:
- Conference Proceedings
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