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Study on the methods for ensuring the precision of an x-ray microscope

Author(s):
  • L. Zhao ( Ludong Univ., China )
  • D. Sun ( Ludong Univ., China )
  • P. Liu ( Chengdu Univ. of Technology, China )
  • J. Hu ( Dalian Univ. of Technology, China )
Publication title:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7282
Pub. Year:
2009
Vol.:
2
Page(from):
72822N-1
Page(to):
72822N-4
Pages:
4
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819475428 [0819475424]
Language:
English
Call no.:
P63600/7282
Type:
Conference Proceedings

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