I. Englard ; P. Vanoppen ; J. Finders ; I. Minnaert-Janssen ; F. Duray ; J. Meessen ; G. Janssen ; O. Adan ; L. Gershtein ; R. Peltinov ; C. Masia ; R. Piech
Pub. info.:
Metrology, inspection, and process control for microlithography XXI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
M. Dusa ; J. Quaedackers ; O. F. A. Larsen ; J. Meessen ; E. van der Heijden ; G. Dicker ; O. Wismans ; P. de Haas ; K. van I. Schenau ; J. Finders ; B. Vleeming ; G. Storms ; P. Jaenen ; S. Cheng ; M. Maenhoudt
Pub. info.:
Optical microlithography XX. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
M. Ben Yishai ; J. Finders ; R. Kazinczi ; A. Bleeker ; P. Luehrmann
Pub. info.:
Photomask and next-generation lithography mask technology XV. 2 pp.70283H-1-70283H-11, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
M. Dusa ; B. Arnold ; J. Finders ; H. Meiling ; K. van Ingen Schenau
Pub. info.:
Photomask and next-generation lithography mask technology XV. 1 pp.702810-1-702810-11, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
E. van Setten ; O. Wismans ; K. Grim ; J. Finders ; M. Duso
Pub. info.:
EMLC 2008 : 24th European Mask and Lithography Conference : 21-24 January 2008, Dresden, Germany. pp.67920K-1-67920K-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering