1.

Conference Proceedings
Conference Proceedings
1. Characterization techniques for surface-micromachined devices
Eaton,W.P. ; Smith,N.F. ; Irwin,L.W. ; Tanner,D.M.
Pub. info.: Micromachined Devices and Components IV.  pp.171-178,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514
2.

Conference Proceedings
Conference Proceedings
2. Characterization techniques for surface-micromachined devices
Eaton,W.P. ; Smith,N.F. ; Irwin,L.W. ; Tanner,D.M.
Pub. info.: Micromachined Devices and Components IV.  pp.431-438,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514