1.

Conference Proceedings
Conference Proceedings
1. Model-based PPC verification methodology with two dimensional pattern feature extraction
Hashimoto, K. ; Ito, T. ; Ikeda, T. ; Nojima, S. ; Inoue, S.
Pub. info.: Optical Microlithography XVI.  Part Two  pp.1156-1165,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
2.

Conference Proceedings
Conference Proceedings
2. Tolerance-based process proximity correction (PPC) verification methodology
Hashimoto, K. ; Fujise, H. ; Nojima, S. ; Ito, T. ; Ikeda, T.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XI.  pp.471-480,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5446