Hourai, M. ; Nagashima, T. ; Kajita, E. ; Miki, S. ; Sumita, S. ; Sano, M. ; Shigematsu, T.
Pub. info.:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.156-167, 1994. Pennington, NJ. Electrochemical Society
Sano, M. ; Hourai, M. ; Sumita, S. ; Shigematsu, T.
Pub. info.:
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing. pp.3-15, 1993. Pennington, NJ. Electrochemical Society