Blank Cover Image

Advanced RELACS (resolution enhancment of lithography by assist of chemical shrink) material for 193-nm lithography

Author(s):
Hong, S. ( Clariant Japan K.K. (Japan) )
Takano, Y. ( Clariant Japan K.K. (Japan) )
Kanda, T. ( IMEC (Belgium) )
Kudo, T. ( Clariant Corp. (USA) )
Padmanaban, M. ( Clariant Corp. (USA) )
Tanaka, H. ( Clariant Japan K.K. (Japan) )
Lee, S.-H. ( Samsung Electronics Co., Ltd. (South Korea) )
Lee, J.-H. ( Samsung Electronics Co., Ltd. (South Korea) )
Woo, S.-G. ( Samsung Electronics Co., Ltd. (South Korea) )
4 more
Publication title:
Advances in Resist Technology and Processing XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5039
Pub. Year:
2003
Vol.:
1
Pt.:
Session 5
Page(from):
195
Page(to):
206
Pages:
12
Pub. info.:
Bellingham, CA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448446 [0819448443]
Language:
English
Call no.:
P63600/5039
Type:
Conference Proceedings

Similar Items:

Hong, S., Nishibe, T., Okayasu, T., Takahashi, K., Takano, Y., Kang, W., Tanaka, H.

SPIE - The International Society of Optical Engineering

Lee, C. H., Han, S., Park, K. S., Kang, H. Y., Oh, H. W., Lee, J. E., Kim, K. M., Kim, Y. H., Kim, T. S., Oh, H.-K.

SPIE - The International Society of Optical Engineering

Kanda,T., Tanaka,H., Kinoshita,Y., Watase,N., Eakin,R.J., Ishibashi,T., Toyoshima,T., Yasuda,N., Tanaka,M.

SPIE - The International Society for Optical Engineering

Dammel, R.R., Sakamuri, R., Lee, S.-H., Rahman, M.D., Kudo, T., Romano, A.R., Rhodes, L.F., Lipian, J., Hacker, C., …

SPIE-The International Society for Optical Engineering

Kudo, T., Lin, G., Lee, D., Rahman, D., Timko, A., Mckenzie, D., Anyadiegwu, C., Chiu, S., Houlihan, F., Rentkiewicz, …

SPIE - The International Society of Optical Engineering

DellaGuardia,R., Petrillo,K.E., Chen,J., Rabidoux,P., Dalton,T.J., Holmes,S.J., Hadel,L.M., Malone,K., Mahorowala,A.P., …

SPIE-The International Society for Optical Engineering

T. Kudo, S. Chakrapani, G. Lin, C. Anyadiegwu, C. Antonio, D. Parthasarathy, R. R. Dammel, M. Padmanaban

SPIE - The International Society of Optical Engineering

Padmanaban, M., Dammel, R.R., Lee, S.H., Kim, W.-K., Kudo, T., McKenzie, D.S., Rahman, D.

SPIE-The International Society for Optical Engineering

Terai, M., Toyoshima, T., Ishibashi, T., Tarutani, S., Takahashi, K., Takano, Y., Tanaka, H.

SPIE-The International Society for Optical Engineering

Padmanaban, M., Alemy, E., Dammel, R.R., Kim, W.-K., Kudo, T., Lee, S.-H., McKenzie, D.S., Orsi, A., Rahman, D., Chen, …

SPIE-The International Society for Optical Engineering

Choi, S.-H., Park, T.-H., Kim, E., Youn, H.-J., Lee, D.-Y., Ban, Y.-C., Je, A.-Y., Kim, D.-H., Hong, J.-S., Kim, Y.-H., …

SPIE - The International Society of Optical Engineering

Lee, H.-R., Shin, J., Kim, H.-W., Woo, S.-G., Cho, H.-K., Han, W.-S.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12