Photodiodes in Bonded SOI Films
- Author(s):
Harendt, C. Beintner, J. Schunbauer, A. Apel, U. Dudek, V. Graf, H.-G. Hoefflinger, B. Seger, U. - Publication title:
- Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 97-36
- Pub. Year:
- 1997
- Page(from):
- 568
- Page(to):
- 575
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771894 [1566771897]
- Language:
- English
- Call no.:
- E23400/97-36
- Type:
- Conference Proceedings
Similar Items:
Electrochemical Society |
7
Conference Proceedings
Recent Advances in Thinning of Bonded SOI Wafers by Plasma-Assisted Chemical Etching
Electrochemical Society |
Electrochemical Society |
Martinus Nijhoff Publishers |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
6
Conference Proceedings
Novel Device Concept for Voltage-Bias Controlled Color Detection in Amorphous Silicon Sensitized CMOS Cameras
Materials Research Society |
12
Conference Proceedings
Spectrophotometry and beam profile reflectometry measurement of six layers in an SOI film stack
SPIE-The International Society for Optical Engineering |