Hinschberger, B. ; Gomber, C. ; Ithier, L. ; Couturier, L. ; Sherman, B. ; Rothlevi, O. ; Ben-Porath, A.
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Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA. pp.162-167, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Blanc-Coquand, S. ; Hinschberger, B. ; Rouchouze, E. ; Sicurani, E. ; Castagna, M. ; Weschler, M. ; Dworkin, L. ; Renard, D. ; Panyasak, A.
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Metrology, Inspection, and Process Control for Microlithography XVIII. pp.819-826, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering