1.

Conference Proceedings

Conference Proceedings
Hinschberger, B. ; Gomber, C. ; Ithier, L. ; Couturier, L. ; Sherman, B. ; Rothlevi, O. ; Ben-Porath, A.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.162-167,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
2.

Conference Proceedings

Conference Proceedings
Blanc-Coquand, S. ; Hinschberger, B. ; Rouchouze, E. ; Sicurani, E. ; Castagna, M. ; Weschler, M. ; Dworkin, L. ; Renard, D. ; Panyasak, A.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.819-826,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375