1.

Conference Proceedings
Conference Proceedings
1. Minimization of the Profile Microloading in Polysilicon Etching
Lum, R. ; Tsai, P. ; Furr, M. ; Bucknall, R.E. ; Wiltse, M. ; Hills, G.W.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.254-263,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
2.

Conference Proceedings
Conference Proceedings
2. The Development and Performance of an Electrostatic Chuck for Silicon Etches
Su, J. ; Hills, G.W. ; Tsai, P.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.291-299,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20