1.

Conference Proceedings
Conference Proceedings
1. The Development and Performance of an Electrostatic Chuck for Silicon Etches
Su, J. ; Hills, G.W. ; Tsai, P.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.291-299,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
2.

Conference Proceedings
Conference Proceedings
2. Strip Process Optimization for Porous ULK Films
Kalinowski, I.J. ; Bourlot, C. ; Marfoure, A. ; Louveau, O. ; Li, S. ; Su, J. ; Hills, G.W. ; Louis, D.
Pub. info.: Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium.  pp.216-223,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-10
3.

Conference Proceedings
Conference Proceedings
3. Characterization of Plasma Strip Processes on OSG Low-k Dielectric Films
Li, S. ; Ostrowski, K. ; Kalinovski, I.J. ; Su, J. ; Hills, G.W.
Pub. info.: Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium.  pp.224-231,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-10