Ikeda, T. ; Higuchi, H. ; Ohkura, Y. ; Wakahara, S.
Pub. info.:
Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices. pp.251-258, 1997. Pennington, NJ. Electrochemical Society
Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.. pp.125-130, 1985. Pittsburgh, Pa.. Materials Research Society