1.

Conference Proceedings
Conference Proceedings
1. R-mask: a new concept and its application for small-volume production
Hayano, K. ; Hotta, S. ; Hasegawa, N. ; Hosono, K. ; Tanaka, T. ; Suko, K. ; Sasaki, S. ; Mohri, H. ; Hoga, M. ; Hayashi, N.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.257-268,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567
2.

Conference Proceedings
Conference Proceedings
2. New double exposure technique using alternating phase-shifting mask with reversed phase
Hotta, S. ; Hayano, K. ; Kakuta, K. ; Hasegawa, N.
Pub. info.: Optical Microlithography XVII.  pp.545-554,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377