1.

Conference Proceedings

Conference Proceedings
Hayano, K. ; Hotta, S. ; Hasegawa, N. ; Hosono, K. ; Tanaka, T. ; Suko, K. ; Sasaki, S. ; Mohri, H. ; Hoga, M. ; Hayashi, N.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.257-268,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567
2.

Conference Proceedings

Conference Proceedings
Fujii, A. ; Sasaki, S. ; Shimizu, M. ; Kobayashi, Y. ; Tominaga, T. ; Hoga, M. ; Mohri, H. ; Hayashi, N. ; Hayano, K. ; Hasegawa, N. ; Hosono, K. ; Arai, T.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.960-967,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567