1.

Conference Proceedings
Conference Proceedings
1. Practical DUV lithography for the optoelectronics market
Harris, P.D. ; McCallum, M. ; Muir, D. ; Hughes, G. ; Pinkney, S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  2  pp.910-917,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
2.

Conference Proceedings
Conference Proceedings
2. Effect of aberrations on defect printing and inspection
Harris, P.D. ; McCallum, M.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1480-1491,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691