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Practical DUV lithography for the optoelectronics market

Author(s):
  • Harris, P.D. ( Nikon Precision Europe GmbH (United Kingdom) )
  • McCallum, M. ( Nikon Precision Europe GmbH (United Kingdom) )
  • Muir, D. ( Compugraphics International Ltd. (United Kingdom) )
  • Hughes, G. ( Compugraphics International Ltd. (United Kingdom) )
  • Pinkney, S. ( Nikon Precision Europe GmbH (United Kingdom) )
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5038
Pub. Year:
2003
Vol.:
2
Page(from):
910
Page(to):
917
Pages:
8
Pub. info.:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448439 [0819448435]
Language:
English
Call no.:
P63600/5038
Type:
Conference Proceedings

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