1.

Conference Proceedings
Conference Proceedings
1. SIMULATION OF BURIED LAYER EXPERIMENTS CONTAIN- ING ALL FOUR DOPANT SPECIES
Ghaderi, K. ; Hobler, G. ; Budil, M. ; Poetzl, H. ; Pichler, P. ; Ryssel, H. ; Hansch, W. ; Eisele, I. ; Tian, C. ; Stingeder, G.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.613-624,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
2.

Conference Proceedings
Conference Proceedings
2. Silver Metallization With Reactively Sputtered TiN Diffusion Barrier Films
Gao, L. ; Gstottner, J. ; Emling, R. ; Linsmeier, Ch. ; Balden, M. ; Wiltner, A. ; Hansch, W. ; Schmitt-Landsiedel, D.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.255-260,  2004.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 812
3.

Conference Proceedings
Conference Proceedings
3. Silver Patterning by Reactive Ion Beam Etching for Microelectronics Application
Gao, L. ; Gstoettner, J. ; Emling, R. ; Wang, P. ; Hansch, W. ; Schmitt-Landsiedel, D.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.185-190,  2004.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 812
4.

Conference Proceedings
Conference Proceedings
4. Device Quality of Hydrogen Plasma Cleaning for Silicon Molecular Beam Epitaxy
Hansch, W. ; Eisele, I. ; Kibbel, H. ; Konig, U.
Pub. info.: Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA.  pp.345-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 386