1.

Conference Proceedings

Conference Proceedings
Kim, D. Y. ; Cho, S. Y. ; Kim, H. ; Huh, S. M. ; Chung, D. H. ; Cha, B. C. ; Lee, J. W. ; Choi, S. W. ; Han, W. S. ; Park, K. H. ; Kim, E. J. ; Guo, Z. ; Quach, E. ; Gee, D. ; Brown, T.
Pub. info.: Photomask Technology 2006.  pp.63492L-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
2.

Conference Proceedings

Conference Proceedings
Cho, W. I. ; Park, J. H. ; Chung, D. H. ; Choi, S. W. ; Han, W. S.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.599205-599205,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
3.

Conference Proceedings

Conference Proceedings
Kim, D. Y. ; Cho, W. I. ; Park, J. H. ; Chung, D. H. ; Cha, B. C. ; Choi, S. W. ; Han, W. S. ; Park, K. H. ; Kim, N. W. ; Hess, C. ; Ma, W. ; Kim, D.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.599209-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
4.

Conference Proceedings

Conference Proceedings
Doh, J. G. ; Lee, S. H. ; Yoon, J. B. ; Lee, D. Y. ; Cho, S. Y. ; Kim, B. G. ; Choi, S. W. ; Han, W. S.
Pub. info.: Photomask Technology 2006.  pp.63491U-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349