1.

Conference Proceedings
Conference Proceedings
1. Impact of Metal Contamination of 7.0 nm Gate Oxides on Various Substrate Materials
Saito, S. ; Hamada, K. ; Eaglesham, D. J. ; Shiramizu, Y. ; Benton, J. L. ; Kitajima, H. ; Jacobson, S. D. C. ; Poate, J. M.
Pub. info.: Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A..  pp.81-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 477
2.

Conference Proceedings
Conference Proceedings
2. Investigation of Lateral and Vertical Profiles Enhanced by Implantation
Mineji, A. ; Hamada, K. ; Saito, S.
Pub. info.: Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.751-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 396
3.

Conference Proceedings
Conference Proceedings
3. Anomalous Leakage Current Reduction by Ramping Rate Control in MeV Implantation
Hamada, K. ; Nishio, N. ; Saito, S.
Pub. info.: Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.739-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 396
4.

Conference Proceedings
Conference Proceedings
4. Impact of Metal Contamination of 7.0 nm Gate Oxides on Various Substrate Materials
Saito, S. ; Hamada, K. ; Eaglesham, D. J. ; Shiramizu, Y. ; Benton, J. L. ; Kitajima, H. ; Jacobson, S. D. C. ; Poate, J. M.
Pub. info.: Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A..  pp.141-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 473