Lu, Z. ; Habermehl, S. ; Lucovsky, G. ; Dietz, N. ; Bachmann, K.J. ; Osgood, R.M.
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Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.416-424, 1994. Pennington, NJ. Electrochemical Society
Dietz, N. ; Habermehl, S. ; Kelliher, J. T. ; Lucovsky, G. ; Bachmann, K. J.
Pub. info.:
Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.495-, 1994. Pittsburgh, PA. MRS - Materials Research Society